Noise shielding techniques for ultra low current measurements in biochemical applications

摘要

A device having an integrated noise shield is disclosed. The device includes a plurality of vertical shielding structures substantially surrounding a semiconductor device. The device further includes an opening above the semiconductor device substantially filled with a conductive fluid, wherein the plurality of vertical shielding structures and the conductive fluid shield the semiconductor device from ambient radiation. In some embodiments, the device further includes a conductive bottom shield below the semiconductor device shielding the semiconductor device from ambient radiation. In some embodiments, the opening is configured to allow a biological sample to be introduced into the semiconductor device. In some embodiments, the vertical shielding structures comprise a plurality of vias, wherein each of the plurality of vias connects more than one conductive layers together. In some embodiments, the device comprises a nanopore device, and wherein the nanopore device comprises a single cell of a nanopore array.

主权项

1. A device comprising:
a. nanopore device comprising a nanopore disposed in a membrane; b. a sensor circuit in proximity to the nanopore disposed in the membrane; and c. a cavity substantially filled with a conductive liquid; wherein the conductive liquid shields the nanopore device from radiation.