| 主权项 |
1. A substrate arrangement comprising a substrate having a surface configured to receive, by epitaxy, an epitaxial layer of semiconducting material, the substrate comprising a laminate having a handle layer and a seed layer, the seed layer having a crystal orientation arranged to receive the epitaxial layer and the handle layer having a crystal orientation different to the seed layer;
in which the seed layer comprises a [111] surface oriented Silicon layer and the epitaxial layer comprises a [0001] surface orientated Gallium Nitride layer and the handle layer is of Silicon and, relative to the seed layer, the handle layer is twisted by an angle between 40° and 80° and tilted by an angle of between 45° and 65° wherein 0° twist and 0° tilt corresponds to a crystal alignment with the seed layer, wherein the z-direction is defined as perpendicular to the surface and, for the [111] surface oriented seed layer, the seed layer has a crystal orientation corresponding to a 45° twist in the x-y plane and 54.7° tilt in the x-z plane of a [100] diamond unit cell aligned to the x, y, z axes. |
