发明名称 |
Manufacturing method of top plate of plasma processing apparatus |
摘要 |
A manufacturing method of a top plate hermetically attached to an upper opening of a tubular shaped container body for forming a processing container of a plasma processing apparatus is provided. The manufacturing method includes the steps of; preparing a top plate body comprised of a dielectric body for transmitting an electromagnetic wave, and having a gas ejection hole for ejecting a gas into the processing container; forming a discharge prevention member having a discharge prevention member body comprised of a dielectric body having a permeability, and a dense member comprised of a dielectric body without a permeability covering at least a side face of the discharge prevention member body; and attaching the discharge prevention member in the gas ejection hole of the top plate body. |
申请公布号 |
US8925351(B2) |
申请公布日期 |
2015.01.06 |
申请号 |
US201313938507 |
申请日期 |
2013.07.10 |
申请人 |
Tokyo Electron Limited |
发明人 |
Tian Caizhong;Nozawa Toshihisa;Ishibashi Kiyotaka |
分类号 |
C03C27/10;C03C27/00;B32B37/12;H01J37/32 |
主分类号 |
C03C27/10 |
代理机构 |
Pearne & Gordon LLP |
代理人 |
Pearne & Gordon LLP |
主权项 |
1. A manufacturing method of a top plate hermetically attached to an upper opening of a tubular shaped container body for forming a processing container of a plasma processing apparatus, the method comprising the steps of;
preparing a top plate body comprised of a dielectric body for transmitting an electromagnetic wave, and having a gas ejection hole for ejecting a gas into the processing container; forming a discharge prevention member having a discharge prevention member body comprised of a dielectric body having a permeability, and a dense member comprised of a dielectric body without a permeability covering at least a side face of the discharge prevention member body; and attaching the discharge prevention member in the gas ejection hole of the top plate body, wherein the process for forming the discharge prevention member further comprises the steps of; preparing the dense member formed in a tubular shape; and baking the tubular shaped dense member filled with a material comprising the discharge prevention member body. |
地址 |
Tokyo JP |