Method for an improved checking of repeatability and reproducibility of a measuring chain for semiconductor device testing

摘要

A method provides an improved checking of repeatability and reproducibility of a measuring chain, in particular for quality control by semiconductor device testing. The method includes testing steps provided for multiple and different devices to be subjected to measurement or control through a measuring system that includes at least one chain of measuring units between a testing apparatus (ATE) and each device to be subjected to measurement or control. Advantageously, the method comprises checking repeatability and reproducibility of each type of unit that forms part of the measuring chain and, after the checking, making a correlation between the various measuring chains as a whole to check repeatability and reproducibility, using a corresponding device subjected to measurement or control.

主权项

1. A method, comprising:
checking repeatability and reproducibility of a plurality of measuring chains for semiconductor device testing, each measuring chain including a testing apparatus and concatenation of test units between the testing apparatus of the measuring chain and a device to be tested, the checking including: checking repeatability and reproducibility of at least one of the test units of each of said measuring chains; making a correlation between the measuring chains as a whole, wherein checking the repeatability and reproducibility of the at least one of the test units of each of said measuring chains comprises checking the repeatability and reproducibility of test units of the measuring chains that depend upon the device to be tested separately from checking the repeatability and reproducibility of test units of the measuring chains that do not depend upon the device to be tested.