| 摘要 |
<p>The nanoparticle collecting apparatus of the present invention comprises: a connection unit to introduce nanoparticles of silicon (Si) or silicon oxide (SiOx) quenched and transferred from a nanoparticle manufacturing unit; a housing connected to the connection unit on the upper end flowing in the nanoparticles of silicon (Si) or silicon oxide (SiOx) introduced along the connection unit to the inner space; and a plurality of trap plates arranged in a plurality of layers in the space having transfer holes formed to be crossed in order to trap the nanoparticles of silicon (Si) or silicon oxide (SiOx) flowed into the space, and to transfer downwards in a zig-zag form.</p> |
