Semiconductor device

摘要

A semiconductor device, including a substrate having an active region defined therein, a plurality of bit lines extending on the substrate in a first direction, a plurality of interconnection lines extending on the substrate in a second direction, a pad electrically connected to the plurality of interconnection lines and configured to apply an external voltage, a plurality of metal contacts electrically connecting the interconnection lines and the plurality of bit lines, and a plurality of bit line contacts that are in contact with the active region and electrically connect the plurality of bit lines and the active region, wherein a size of at least some of the bit line contacts and/or at least some of the metal contacts vary based on a distance of the respective bit line contact or the metal contact from the pad.

主权项

1. A semiconductor device, comprising:
a substrate having an active region defined therein; a plurality of bit lines extending on the substrate in a first direction; a plurality of interconnection lines extending on the substrate in a second direction orthogonal to the first direction; a pad electrically connected to the plurality of interconnection lines and applying an external voltage; a plurality of metal contacts electrically connecting the interconnection lines and the plurality of bit lines; and a plurality of bit line contacts in contact with the active region and electrically connecting the plurality of bit lines and the active region, wherein an area of one bit line contact contacting the active region is greater than an area of another bit line contact contacting the active region when a distance between the one bit line and the pad is shorter than a distance between the another bit line and the pad.