| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a fine flow channel in a sintered body of a ceramic composition at a low cost and accurately.SOLUTION: A manufacturing method of a fine flow channel includes: steps (s2 to s5) of fabricating a plurality of green sheets (20, 20a, 20b) including a green sheet including through holes (21a, 21b); a step (s6) of filling filler 30 which consists of resin dissolved into solvent into holes of the green sheet; steps (s7, s8) of laminating the green sheet to form a laminate 1a; a defatting step (s10) of thermally treating the laminate at temperature lower than firing temperature; and a step (s10) of firing the laminate to obtain a sintered body 1. In the laminating step, a flow channel filled with the filler is formed inside the laminate by the green sheet that underwent the filling step, and the resin is decomposed by thermal treatment at temperature lower than the firing temperature of the sintered body, by which the filler is removed from the hole and a hollow flow channel 10 is formed inside the sintered body obtained by the firing step. |
