SUBSTRATE INSPECTION DEVICE AND SUBSTRATE INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate inspection device capable of inspecting a crack with inexpensive and simple constitution without coming in contact with a substrate, and a substrate inspection method.SOLUTION: The substrate inspection device includes a support device for supporting the substrate from the first main surface side of the substrate, and a fluid loading device for applying a load onto the substrate by blowing a fluid onto a residual region of a region facing to a supported region of the first main surface.