Method of design-based defect classification and system thereof

摘要

There is provided an inspection method capable of classifying defects detected on a production layer of a specimen. The method comprises: obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; and sorting the processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation, wherein at least one classification operation sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each classification operation, excluding the last one, sorts at least part of the processed defects to be processed by one or more of the following classification operations.

主权项

1. A computer-implemented method for classifying defects detected on a production layer of a specimen, the method comprising:
obtaining input data related to the detected defects; processing the input data using a decision algorithm associated with the production layer and specifying two or more classification operations and a sequence thereof; sorting processed defects in accordance with predefined bins, wherein each bin is associated with at least one classification operation specified by the decision algorithm, wherein the at least one classification operation specified by the decision algorithm sorts at least part of the processed defects to one or more classification bins to yield finally classified defects, and wherein each given classification operation specified by the decision algorithm, excluding the last classification operation in the sequence specified by the decision algorithm, sorts at least part of the processed defects to be processed by one or more of the classification operations following the given classification operation in the sequence specified by the decision algorithm; and storing at least finally classified defects in a storage medium.