Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus

摘要

There is provided a group management apparatus connected to a substrate processing apparatus configured to store at least a configuration file, the group management apparatus including a controller configured to: receive a command for generating a file group for the configuration file; receive the configuration file and at least one associated file related to the configuration file from the substrate processing apparatus according to the command for generating the file group; and generate the file group including the configuration file and the associated file received from the substrate processing apparatus and store the file group in a state where an output is possible.

主权项

1. A management apparatus connected to a substrate processing apparatus configured to store at least a configuration file including at least a process recipe defining a process condition and a process order, the management apparatus comprising:
an input reception unit configured to receive a command for obtaining the configuration file or a combination file including the configuration file and an associated file; a file obtaining unit configured to obtain the configuration file and the associated file from the substrate processing apparatus according to the command received by the input reception unit; a file group generation unit configured to generate a file group by summarizing the configuration file or by summarizing the configuration file and the associated file obtained by the file obtaining unit; a file group storage unit configured to store the file group generated by the file group generation unit; and a controller comprising at least one processing unit, the controller being configured to read the process recipe in the configuration file received by controlling the input reception unit, the file obtaining unit, the file group generation unit and the file group storage unit, wherein the associated file comprises at least one selected from the group consisting of: a sub-recipe file containing a sub-recipe related to the process recipe, a temperature control parameter file containing a proportional integral derivative (PID) table for performing temperature control, a pressure control parameter file containing a PID table for performing pressure control, and a transfer parameter file containing transfer parameters.