| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrathin type stage mechanism capable of precisely moving a work, by effectively restraining the occurrence of yawing.SOLUTION: A stage mechanism includes: a fixed stage; and a movable stage for sliding along a surface of the fixed stage, and comprises: s feed mechanism part constituted of a nut member fixed to a side surface of the fixed stage, a screw fastening member fixed to a side surface of the movable stage and a feed screw for rotatably moving along a screw groove of the nut member and rotatably fixed to the screw fastening member; and a pressing bolt member for connecting a predetermined guide member, the fixed stage and the movable stage in a vertical direction and adjusting sliding contact force between the two members, and assuming a thickness of the fixed stage as T1 mm, a thickness of the movable stage as T2 mm, and a diameter of a screw part having the screw groove of the feed screw as T3 mm, the following relational expression (1) is satisfied. (T1+T2)/T3≤4(1). |
