| 摘要 |
PROBLEM TO BE SOLVED: To improve photoelectric conversion efficiency of a photoelectric conversion element.SOLUTION: In a photoelectric conversion element 10, a light reflection layer 100 is provided on a principal surface of a substrate 90 opposite to a light-receiving side. The light reflection layer 100 includes a metal film 102 and a dielectric 104. The metal film 102 is provided in contact with a substrate 90. As a metal forming the metal film 102, there are e.g., Ag, Al, Au, Cu and an alloy of these metals and on a principal surface of the metal film 102 closer to a quantum structure layer 60, a plurality of square rod shaped recesses 112 are formed. The plurality of recesses 112 are arrayed in a square lattice shape in a planar view of the principal surface of the light reflection layer 100 and each recess 112 is filled with the dielectric 104. |
