发明名称 SOLAR CELL WAFER TRANSFERRING BOAT
摘要 <p>The present invention relates to a solar cell wafer transferring boat and, more particularly, to a solar cell wafer transferring boat capable of preventing a paddle part of a transfer module receiving a wafer from being sagged due to the weight of the wafer and horizontally inputting the wafer with regard to a thermal process module by rotating the transfer module to transfer the wafer to the thermal process module or controlling the position of the transfer module right or left with regard to a progressing direction. For this, the present invention includes a base plate which moves along a guide rail installed in the transfer module to transfer the wafer to the thermal process module, a support plate which is arranged on the upper side of the base plate, a horizontal control unit which connects the base plate to the support plate and controls the position of the support plate with regard to the base plate, a body part which is installed on the upper side of the support plate, and the paddle part which is inserted into the front side of the body part to face the thermal process module and is mounted.</p>
申请公布号 KR20150000565(A) 申请公布日期 2015.01.05
申请号 KR20130072732 申请日期 2013.06.24
申请人 NZENIC CO., LTD. 发明人 LEE, SANG YUN;PARK, NOH IL;SHIN, JAE MYOUNG
分类号 H01L31/18;H01L31/04 主分类号 H01L31/18
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