CALIBRATION METHOD OF OPTICAL SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a calibration method of an optical sensor capable of achieving a highly accurate temperature calibration regardless of the specifications of the optical sensor.SOLUTION: An optimum light quantity is determined for calibrating a temperature scale according to specifications of an infrared radiation thermometer defined as a calibration object. An optical chopper is designed such that an area ratio of its rotary vane becomes a value corresponding to the optimum light quantity, and the rotary vane is mounted on a light-receiving unit optical path through which radiation light emitted from a blackbody furnace enters a light-receiving unit of the infrared radiation thermometer. A gray body radiation source smaller in emissivity by a desired ratio is achieved by making the rotary vane of the optical chopper rotate at a frequency larger than a reciprocal number of a response time (time constant) without modulating output signal of the infrared radiation thermometer.