| 摘要 |
PROBLEM TO BE SOLVED: To uniform the width-direction distribution of compression stresses applied to a mesa step, thereby improving the trade-off relation existing between the reliability and sensitivity of a force detection element.SOLUTION: A force detection element 1 includes a semiconductor substrate 10 and a force transmission block 30. The semiconductor substrate 10 has: a gauge part 14 and a groove 12A which are formed on a mesa step 13 that extends crossing grooves 12A and 12B; and a support part 16 which is formed in the grooves 12A and 12B. The force transmission block 30 contacts a top surface of the mesa step 13, a top surface of the support part 16, and a surface of a peripheral edge part 15 of the grooves 12A and 12B. |
