| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a substrate for a liquid discharge head, allowing high-accuracy formation of a second protective layer on thermal energy generation elements of the substrate for the liquid discharge head having the thermal energy generation elements. ! SOLUTION: A liquid discharge head includes a protective layer in which reduction of an area of an effective foaming region is suppressed without needing a patterning process after protective layer formation by forming the second protective layer in positions corresponding to thermal energy generation elements above a first protective layer by generating thermal energy by the thermal energy generation elements in a gas atmosphere containing an organometallic compound and thermally decomposing the organometallic compound. ! COPYRIGHT: (C)2015,JPO&INPIT |
