| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device capable of quickly performing laser processing of graphene in an optimum condition, without putting in time and trouble.SOLUTION: A reflectance measurement part 114 measures reflectance, at a processing part, of illumination light radiated from a light source 113 for measuring reflectance. The illumination light radiated from the light source 113 for measuring reflectance is reflected at a semi-reflecting mirror 115, transmitted through a semi-reflecting mirror 106, condensed by a condensing lens 107, and reflected at the processing part. The reflected light reflected at the processing part passes through the condensing lens 107, the semi-reflecting mirror 106, the semi-reflecting mirror 115, a semi-reflecting mirror 111, and a semi-reflecting mirror 112, and light intensity of the reflected light is measured at the reflectance measurement part 114. Since reflected light of a laser for processing is shut out by a cut filter provided on an incident side, the reflectance measurement part 114 can measure reflectance even when the laser for processing is radiated and processing is performed. |
