| 摘要 |
PROBLEM TO BE SOLVED: To provide a measurement device for performing an optical distance determination or a position determination with high accuracy.SOLUTION: The measurement device includes: a light source; at least one optical functional element that is formed as a plane mirror or a reference instrument; and a detection device. At least two partial rays of light are generated, and at least one partial ray of light of the partial rays of light collides with the functional element three times, and next, the partial ray of light is propagated in a direction of the detection device in a state where the partial rays of light are overlapped by interference, and via the detection device, at least one phase-modulated measurement signal is enabled to be generated from the overlapped partial rays of light. The partial ray of light passes through at least two image formation elements while the partial ray of light collides with the optical functional element, and when the optical functional element is inclined with respect to a target state, a magnification of the image formation element is configured so that deviations of a position of the interfered partial ray of light and a direction thereof are not generated. |
