| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer chamfering device which can provide information relating to positional deviation, etc. of a wafer upon chamfering processing of wafer, and information for determination of the necessary time of truing or dressing, and for determination upon ending of truing or dressing operation.SOLUTION: A wafer chamfering device performs chamfering of a wafer by bringing a grindstone of disc shape which is rotated by a spindle into contact with the wafer of disc shape which is rotated. Therein, an AE (Acoustic Emission) sensor is provided, the AE sensor is composed of an AE sensor transmission part and an AE sensor reception part, the AE sensor transmission part is installed at least on any of the grindstone, a base metal of the grindstone and a flange, and the AE sensor reception part is installed on any position in the way of rotation of the AE sensor transmission part which is rotated in accordance with rotation of the spindle and on a place opposite to the AE sensor transmission part. |
