| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an inspection device and an inspection method which enable the transport of a mobile object to be inspected with high accuracy.SOLUTION: The inspection device according to an embodiment includes: irradiation means for irradiating, with a laser beam, a position through which a mobile object transported by a transport mechanism passes; imaging means for capturing, at prescribed time intervals, the image of a spectrum of the laser beam generated in an area irradiated with the laser beam; calculation means for calculating, for each time interval, the amount of movement of the mobile object on the basis of an image correlation between two spectrum images captured at the prescribed time intervals; correction means for correcting the calculated amount of movement of the mobile object by using size information indicating the size of the mobile object in the transport direction of the mobile object; and determination means for determining, on the basis of the corrected amount of movement of the mobile object, whether or not the transport of the mobile object is good.</p> |
