| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a three-dimensional shape measurement device capable of suppressing the external shape of a light-source unit including a light source and a digital mirror device from increasing.SOLUTION: A visual inspection device 100 (three-dimensional shape measurement device) comprises: an LED 323; a DMD 326 for irradiating, by reflecting the light irradiated from the LED 323, a substrate 110 with a stripe-pattern light alternately including a bright portion and a dark portion capable of obtaining height information about the substrate 110; and an image-capturing unit 31 for capturing the image of the substrate 110 irradiated with the stripe-pattern light by the DMD 326, the DMD 326 being configured by a plurality of mirrors 326a which are disposed so as to form a diamond array.</p> |
