APPARATUS FOR MONITORING DEPOSITION RATE, APPARATUS FOR ORGANIC LAYER DEPOSITION USING THE SAME, METHOD FOR MONITORING DEPOSITION RATE, AND METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME

摘要

The embodiments of the present invention relate to an apparatus for monitoring a deposition rate, an organic layer depositing apparatus including the same, a method for monitoring the deposition rate, and a method for manufacturing an organic light emitting display device using the same. The present invention provides the apparatus for monitoring the deposition rate capable of measuring the deposition rate of a deposition material discharged from a deposition source. Provided is the apparatus for monitoring the deposition rate which includes a light source which emits light with a wavelength within a photoexcitation bandwidth of the deposition material, a first optical system which emits the light from the light source to the deposition material discharged from the deposition source, a second optical system which collects the light from the deposition material, and a first optical sensor which senses an amount of light collected in the second optical system from the deposition material which is excited.