VISIBLE LASER PROBING FOR CIRCUIT DEBUG AND DEFECT ANALYSIS

摘要

Visible laser probing is described. In one example a probe device has a laser configured to provide a laser beam at a visible wavelength, an objective lens positioned in front of the laser to focus the laser beam on an active region of an integrated circuit through a back side of an integrated circuit die, and a detector positioned to receive a reflected laser beam reflected from the active region through a back side of the die, through the objective lens. The detector is configured to detect an amplitude modulation of the reflected laser beam wherein the amplitude modulation is attributable to the electric field at the active region.

主权项

1. A method for detecting a voltage at an active region of an integrated circuit (IC), the method comprising:
operating a laser beam at a visible wavelength; focusing the laser beam through a back side of the IC on an active region of the IC; receiving light from the active region through the back side of the IC at a detector; and determining a voltage of the active region based on the received light.