| 摘要 |
A control device (50) for a charged particle beam device (100) tilts the irradiation axis of a primary electron beam (4) to the left, straight, or to the right via tilting coils (11, 12) each time the primary electron beam (4) scans the surface of a sample (15) over a single scanning line. When the irradiation axis is changed, the focal point of the primary electron beam (4) is adjusted by a focal point-adjusting coil (14) based on the tilt of the irradiation axis in order to take a left-tilted observation image, a non-tilted observation image or a right-tilted observation image of the surface of a sample (15) for each scanning line. The left-tilted observation images, non-tilted observation images and right-tilted observation images for the scanning lines obtained up to this point are simultaneously displayed on the same display device (31). In this way, focused non-tilted observation images and focused tilted observation images can be taken and displayed nearly simultaneously. |
| 主权项 |
1. A charged-particle beam device, comprising a charged-particle source; a plurality of electronic lenses to focus a primary charged-particle beam emitted from the charged-particle source; a charged-particle beam scanning control means to control deflection of the primary charged-particle beam in order that, when the focused primary charged-particle beam is irradiated onto a surface of a sample, an irradiation point thereof scans the surface of the sample two-dimensionally; an irradiation-axis tilting means to tilt an irradiation axis of the primary charged-particle beam when the primary charged-particle beam is irradiated onto the sample; a focal-position adjusting means to conduct an adjustment in order that a focal position when the irradiation axis of the primary charged-particle beam is tilted by the irradiation-axis tilting means becomes equal to a focal position when the irradiation-axis of the primary charged-particle beam is not tilted; a charged-particle detector to detect charged particles emitted from the sample when the primary charged-particle beam is irradiated onto the sample; and a control device to generate an observation image of the surface of the sample based on a signal detected by the charged-particle detector, characterized in that
the control device causes to control the primary charged-particle beam to scan a same scanning line as one scanning line on the surface of the sample for three times via the irradiation-axis tilting means, the irradiation axis of the primary charged-particle beam to tilt left, not to tilt, or to tilt right in sequence in each of the three scans via the charged-particle beam scanning control means; and when the irradiation axis is changed, the control device adjusts, via the focal-position adjusting means, the focal position of the primary charged-particle beam according to a left-tilted state, a non-tilted state, or right-tilted state of the irradiation axis, to obtain a left-tilted observation image, a non-tilted observation image, or a right-tilted observation image focused on the surface of the sample for the one scanning line, and simultaneously displays the focused left-tilted observation image, the focused non-tilted observation image, and the focused right-tilted observation image with respect to scanning lines obtained up to this time, on one and the same display device. |
