陶瓷构件及半导体制造装置用构件;CERAMIC MEMBER AND MEMBER FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

本发明提供在于包含氧化镁者，包括特性更加提升的陶瓷构件及半导体制造装置用构件。;本发明之半导体制造装置用构件20，包括：基材部22；及形成于基材部22陶瓷构件30。本发明之陶瓷构件30，包括：陶瓷基体32，其包含氧化镁、既定成分固溶于氧化镁之氧化镁固溶体及氧化锆之中之至少1个；及电极34，其系以配置于陶瓷基体32的一部分，以钌铝合金作为电极成分。陶瓷构件30，系平板状的构件，具有内部埋设内部电极34的构造。于该电极34，连接有由陶瓷构件30下侧插入的供电构件26，由该供电构件26供给电力。; and an electrode 34 which is arranged on part of the ceramic base 32 and which contains a ruthenium-aluminum alloy as an electrode component. The ceramic member 30 is a plate-like member and has a structure in which the electrode 34 is embedded therein. The electrode 34 is connected to a feeding member 26 inserted from the underside of the ceramic member 30. Electric power is supplied from the feeding member 26.