包含聚合热酸产生剂之组合物及其方法;A COMPOSITION COMPRISING A POLYMERIC THERMAL ACID GENERATOR AND PROCESSES THEREOF

摘要

本发明系关于包含聚合热酸产生剂之新颖水性组合物，及将该新颖组合物涂覆至光阻剂图案上，藉此在该光阻剂图案上形成该聚合热酸产生剂之层之方法。该聚合热酸产生剂包含具有至少一个结构2之重复单元之聚合物；;其中R1至R5系独立地选自由H及C1-C6烷基组成之群；R6系选自由未经取代之芳基、经取代之芳基、烷基(C1-C8)及氟烷基(C1-C8)组成之群且W系C2-C6伸烷基间隔基。; where R1to R5are independently chosen from the group consisting of H and C1-C6alkyl; R6is chosen from the group consisting of unsubstituted aryl, substituted aryl, alkyl (C1-C8) and fluoroalkyl (C1-C8) and W is a C2-C6alkylene spacer.