METHOD FOR PRODUCING SUBSTRATE FOR SOLAR PHOTOVOLTAIC POWER GENERATORS AND APPARATUS FOR PRODUCING SUBSTRATE FOR SOLAR PHOTOVOLTAIC POWER GENERATORS

摘要

A method for producing a substrate for solar photovoltaic power generators, wherein after cutting off a semiconductor substrate from a semiconductor ingot by slicing, the surface of the semiconductor substrate is provided with a texture structure by being subjected to a surface treatment. This method for producing a substrate for solar photovoltaic power generators comprises: a cleaning step wherein organic impurities and metal impurities adhering to the surface of the semiconductor substrate are cleared and removed by means of a cleaning liquid that contains an oxidizing agent; and an etching step which is carried out sequentially after the cleaning step, and wherein a damaged layer of the substrate surface formed due to slicing is removed and the above-described texture structure is formed on the surface of the semiconductor substrate by anisotropically etching the surface of the semiconductor substrate by means of an aqueous alkaline solution.