发明名称 NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR MANUFACTURING HARDENING RELIEF PATTERN, AND SEMICONDUCTOR DEVICE
摘要 Provided is a negative photosensitive resin composition containing (A) 100 mass parts of a polyimide precursor having a structure expressed by the general formula (1) shown below (R1, R2, X1, and Y1 are as defined in the specification), and (B) 0.1-20 parts by mass of a photopolymerization initiator.
申请公布号 KR20140148451(A) 申请公布日期 2014.12.31
申请号 KR20147030018 申请日期 2013.05.02
申请人 ASAHI KASEI E-MATERIALS CORPORATION 发明人 TAMURA NOBUCHIKA;HIRATA TATSUYA;YOSHIDA MASAHIKO
分类号 G03F7/027;C08G73/10;G03F7/004 主分类号 G03F7/027
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