发明名称 |
NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR MANUFACTURING HARDENING RELIEF PATTERN, AND SEMICONDUCTOR DEVICE |
摘要 |
Provided is a negative photosensitive resin composition containing (A) 100 mass parts of a polyimide precursor having a structure expressed by the general formula (1) shown below (R1, R2, X1, and Y1 are as defined in the specification), and (B) 0.1-20 parts by mass of a photopolymerization initiator. |
申请公布号 |
KR20140148451(A) |
申请公布日期 |
2014.12.31 |
申请号 |
KR20147030018 |
申请日期 |
2013.05.02 |
申请人 |
ASAHI KASEI E-MATERIALS CORPORATION |
发明人 |
TAMURA NOBUCHIKA;HIRATA TATSUYA;YOSHIDA MASAHIKO |
分类号 |
G03F7/027;C08G73/10;G03F7/004 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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