DIAMOND UV SENSOR ELEMENT AND MANUFACTURING METHOD THEREOF, UV SENSOR DEVICE, DIAMOND SINGLE CRYSTAL PROCESSING METHOD

摘要

A method of manufacturing a diamond UV sensor element improved with a UV/visible light blind ratio using a diamond single crystal as a light receiving portion and detecting a light based on the change of electric resistance caused by a light irradiated to the light receiving portion is provided, the method, including (1) a step of hydrogenating the surface of the diamond single crystal in an atmosphere substantially containing hydrogen, and (2) a step of forming a light receiving portion by exposing the hydrogenated surface of the diamond single crystal into an atmosphere containing ozone or active oxygen.