| 摘要 |
A process fluid pressure measurement probe (100) includes a pressure sensor (112) formed of a single-crystal material and mounted to a first metallic process fluid barrier (130) and disposed for direct contact with a process fluid. The pressure sensor (112) has an electrical characteristic that varies with process fluid pressure. A feedthrough (122) is formed of a single-crystal material and has a plurality of conductors extending from a first end to a second end. The feedthrough (122) is mounted to a second metallic process fluid barrier (116) and is spaced from, but electrically coupled to, the pressure sensor (112). The pressure sensor (112) and the feedthrough (122) are mounted such that the secondary metallic process fluid barrier (116) is isolated from process fluid by the first metallic process fluid barrier (116). |
