发明名称 |
METHOD AND ARRANGEMENT FOR MANUFACTURING A RADIATION WINDOW |
摘要 |
In a method for manufacturing a radiation window there is produced a layered structure where an etch stop layer exists between a carrier and a solid layer. A blank containing at least a part of each of the carrier, the etch stop layer, and the solid layer is attached to a radiation window frame. At least a part of what of the carrier was contained in the blank is removed, thus leaving a foil attached to the radiation window frame, wherein the foil contains at least a part of each of the etch stop layer and the solid layer. |
申请公布号 |
EP2817818(A1) |
申请公布日期 |
2014.12.31 |
申请号 |
EP20120868781 |
申请日期 |
2012.02.15 |
申请人 |
HS FOILS OY |
发明人 |
KOSTAMO, ESA;KOSTAMO, JARI;MATTILA, MARCO;SIPILÄ, HEIKKI |
分类号 |
H01J35/18;B32B37/24;B32B38/00;B32B38/10;B82Y30/00;G21K1/10;H01J5/18;H01J9/24;H01J33/00;H01L21/311 |
主分类号 |
H01J35/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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