发明名称 LINEAR EVAPORATION SOURCE AND THIN LAYERS DEPOSITION APPARATUS FOR FLAT PANEL DISPLAY HAVING THE SAME
摘要 Disclosed are a linear evaporation source and a substrate depositing apparatus for a flat panel display having the same. The linear evaporation source according to an embodiment of the present invention comprises a heating module heating a deposition material from a crucible; a nozzle head including a deposition material accommodation unit receiving the deposition material from the crucible and accommodating the same and a module disposing unit allowing the heating module to be disposed on an inner side of the deposition material accommodation unit in a radial direction; and a plurality of nozzles each having one end portion connected to the deposition material accommodation unit of the nozzle head and the other end portion outwardly exposed from the nozzle head and outwardly jetting a deposition material evaporated by the heating module.
申请公布号 KR20140148035(A) 申请公布日期 2014.12.31
申请号 KR20130071385 申请日期 2013.06.21
申请人 SFA ENGINEERING CORP. 发明人 KIM, YOUNG DO;KANG, CHANG HO
分类号 H01L51/56;H05B33/10 主分类号 H01L51/56
代理机构 代理人
主权项
地址