发明名称 METHOD AND SYSTEM FOR CONTROLLING A FLOW RATIO CONTROLLER USING FEEDBACK
摘要 <p>A processing device determines a plurality of initial flow setpoint commands, each of the plurality of setpoint commands corresponding to one of a plurality of valves. The processing device sends each of the plurality of initial setpoint commands to a corresponding one of the plurality of valves. The processing device receives feedback from each of the plurality of valves and determines a plurality of updated flow setpoint commands, each of which corresponds to one of the plurality of valves based on the corresponding feedback from each of the plurality of valves.</p>
申请公布号 WO2014210057(A1) 申请公布日期 2014.12.31
申请号 WO2014US43945 申请日期 2014.06.24
申请人 APPLIED MATERIALS, INC. 发明人 GREGOR, MARIUSCH
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项
地址