摘要 |
Provided is an energy conversion apparatus including a diaphragm (10) on which a coil (15) of a lead pattern is formed, a magnet substrate (11) configured to generate a magnetic field towards the coil (15) on the diaphragm (10), and a magnetic film (12) configured to generate magnetic force between the magnetic film (12) and the magnet substrate to support the diaphragm (10) therebetween. |