| 发明名称 |
TEMPLATE CREATION DEVICE FOR SAMPLE OBSERVATION DEVICE, AND SAMPLE OBSERVATION DEVICE |
| 摘要 |
A template creation device for a sample observation device using design data to create an image processing template is provided with a storage unit for storing process information defining information regarding a plurality of process treatments and a template creation unit using the process information to process the design data and create an image processing template. |
| 申请公布号 |
WO2014208216(A1) |
申请公布日期 |
2014.12.31 |
| 申请号 |
WO2014JP63208 |
申请日期 |
2014.05.19 |
| 申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
OJIMA YUKI;SUKEGAWA SHIGEKI;ABE YUICHI;KAWAHARA TOSHIKAZU;NAGATOMO WATARU;KUBO SHINJI |
| 分类号 |
H01L21/66;G06T7/00 |
主分类号 |
H01L21/66 |
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