发明名称 Improved ion source
摘要 <p>The arc chamber (13) has a bottom liner (34) spaced from the base (26) of the housing (25) and side liners (36) spaced from the side walls (27) to direct gas entering from an inlet port (32) along the base (26) and up the side walls (27) of the housing (25). The bottom liner (34) has notches (35) at two side edges to direct the gas upwardly into the arc chamber (13) and the side liners (36) have slots (3) to direct the gas horizontally into the arc chamber (13) to create a uniform distribution of the gas for gas ionization in the arc chamber.</p>
申请公布号 EP2720247(B1) 申请公布日期 2014.12.31
申请号 EP20120194475 申请日期 2012.11.27
申请人 ION TECHNOLOGY SOLUTIONS, LLC 发明人 JEREZ, MANUEL A.;BORGES, CARLOS F.
分类号 H01J37/08;H01J27/08;H01J37/04 主分类号 H01J37/08
代理机构 代理人
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