Radiation-sensitive resin composition

摘要

A radiation-sensitive resin composition includes an acid-labile group-containing resin, and a compound shown by the following general formula (i). R1 represents a hydrogen atom or the like, R2 represents a single bond or the like, R3 represents a linear or branched unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms or the like, and X+ represents an onium cation.;

主权项

1. A radiation-sensitive resin composition comprising:
an acid-labile group-containing resin; and a compound shown by a general formula (i),wherein
R1 represents a hydrogen atom, a linear or branched unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms, a linear or branched monovalent hydrocarbon group having 1 to 10 carbon atoms in which at least one hydrogen atom is substituted with a fluorine atom, a hydroxyl group, an —OR group, an —OCOR group, a —COOR group, or a monovalent hydrocarbon group having 3 to 20 carbon atoms in which all of the carbon atoms or a part of the carbon atoms form a cyclic structure, wherein R represents a linear or branched monovalent hydrocarbon group having 1 to 10 carbon atoms or a monovalent hydrocarbon group having 3 to 20 carbon atoms in which all of the carbon atoms or a part of the carbon atoms form a cyclic structure, R2 represents a single bond or an —O—(C═O)— group, R3 represents a linear or branched unsubstituted monovalent hydrocarbon group having 1 to 10 carbon atoms, a linear or branched monovalent hydrocarbon group having 1 to 10 carbon atoms in which at least one hydrogen atom is substituted with a fluorine atom, or a monovalent hydrocarbon group having 3 to 20 carbon atoms in which all of the carbon atoms or a part of the carbon atoms form a cyclic structure, and X+ represents an onium cation.