Post metal chemical-mechanical planarization cleaning process

摘要

A post metal chemical-mechanical planarization (CMP) cleaning process for advanced interconnect technology is provided. The process, which follows CMP, combines an acidic clean and a basic clean in sequence. The process can achieve a more than 60% reduction in CMP defects, such as polish residues, foreign materials, slurry abrasives, scratches, and hollow metal, relative to an all-basic clean process. The process also eliminates the circular ring defects that occur intermittently during roller brush cleans within a roller brush clean module.

主权项

1. A method of processing a semiconductor wafer comprising:
planarizing a semiconductor wafer containing at least one metal structure; subjecting the semiconductor wafer to brush cleaning in an acidic medium and in a roller brush station including at least one roller brush; and dipping the semiconductor wafer in a basic medium, wherein said dipping is performed by continuously spinning of said semiconductor wafer and in the absence of mechanical contact with a brush or other component to provide a continuous insoluble metal-containing oxide layer over the entirety of the at least one metal structure.