发明名称 |
DISPOSITIVOS MICROELETROMECÂNICOS (MEMS) E RESPECTIVOS METÓDOS DE FABRICO E DE MODULAÇÃO DA LUZ |
摘要 |
In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate. |
申请公布号 |
BRPI0813296(A2) |
申请公布日期 |
2014.12.30 |
申请号 |
BR2008PI13296 |
申请日期 |
2008.06.24 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
DENIS ENDISCH;MARC MIGNARD |
分类号 |
G02B26/00;B81B3/00 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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