发明名称 A TRANSFER DEVICE FOR HOLDING AN OBJECT USING A GAS FLOW
摘要 Abstract A transfer device for holding an object using gas a flow Disclosed is a transfer device for holding an object. The transfer device comprises: i) a 5 housing having a housing surface; ii) at least one inlet conduit having an inlet for introducing a gas into the at least one inlet conduit; iii) a plurality of sets of outlet conduits, each set of outlet conduits being in fluid communication with the at least one inlet conduit and having a plurality of outlets for directing the gas out of the outlet conduits. In particular, the respective outlets of the sets of outlet conduits are arranged 10 in a direction along the housing surface and away from a centre region relative to the respective sets of outlet conduits, so that a laminar gas flow that is flows along the housing surface generates a pressure differential which creates a force towards the centre region to hold the object against the housing surface. A gang picker is also disclosed. 15 [FIG. 2a] 10
申请公布号 SG10201402399R(A) 申请公布日期 2014.12.30
申请号 SG10201402399R 申请日期 2014.05.16
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD 发明人 BALAKRISHNAN SATHISH KUMAR;KUMARESH GOVINDAN RADHAKRISHNAN;TU WEN GE;LU HONGLIANG;TAN LIAN HOK
分类号 主分类号
代理机构 代理人
主权项
地址