发明名称 Semiconductor device with buried bit line and method for fabricating the same
摘要 A semiconductor device includes trenches defined in a substrate, buried bit lines partially filling the trenches, a first source/drain layer filling remaining portions of the trenches on the buried bit lines, stack patterns having a channel layer and a second source/drain layer stacked therein and bonded to the first source/drain layer, wherein the channel layer contacts with the first source/drain layer, and word lines crossing with the buried bit lines and disposed adjacent to sidewalls of the channel layer.
申请公布号 US8921930(B2) 申请公布日期 2014.12.30
申请号 US201314145430 申请日期 2013.12.31
申请人 SK Hynix Inc. 发明人 Hwang Eui-Seong
分类号 H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119;H01L27/108;H01L29/786 主分类号 H01L29/76
代理机构 IP & T Group LLP 代理人 IP & T Group LLP
主权项 1. A semiconductor device comprising: trenches defined in a substrate; buried bit lines partially filling the trenches; a first source/drain layer filling remaining portions of the trenches on the buried bit lines; stack patterns having a channel layer and a second source/drain layer stacked therein and bonded to the first source/drain layer, wherein the channel layer contacts with the first source/drain layer; and word lines crossing with the buried bit lines and disposed adjacent to sidewalls of the channel layer.
地址 Gyeonggi-do KR