发明名称 |
Semiconductor device with buried bit line and method for fabricating the same |
摘要 |
A semiconductor device includes trenches defined in a substrate, buried bit lines partially filling the trenches, a first source/drain layer filling remaining portions of the trenches on the buried bit lines, stack patterns having a channel layer and a second source/drain layer stacked therein and bonded to the first source/drain layer, wherein the channel layer contacts with the first source/drain layer, and word lines crossing with the buried bit lines and disposed adjacent to sidewalls of the channel layer. |
申请公布号 |
US8921930(B2) |
申请公布日期 |
2014.12.30 |
申请号 |
US201314145430 |
申请日期 |
2013.12.31 |
申请人 |
SK Hynix Inc. |
发明人 |
Hwang Eui-Seong |
分类号 |
H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119;H01L27/108;H01L29/786 |
主分类号 |
H01L29/76 |
代理机构 |
IP & T Group LLP |
代理人 |
IP & T Group LLP |
主权项 |
1. A semiconductor device comprising:
trenches defined in a substrate; buried bit lines partially filling the trenches; a first source/drain layer filling remaining portions of the trenches on the buried bit lines; stack patterns having a channel layer and a second source/drain layer stacked therein and bonded to the first source/drain layer, wherein the channel layer contacts with the first source/drain layer; and word lines crossing with the buried bit lines and disposed adjacent to sidewalls of the channel layer. |
地址 |
Gyeonggi-do KR |