Apparatus comprising substrate and conductive layer

摘要

A nano imprint master and a method of manufacturing the same are provided. The method includes: implanting conductive metal ions into a substrate including quartz to form a conductive layer inside the quartz substrate; coating a resist on the quartz substrate in which the conductive layer is formed, to form a resist coating layer; exposing the resist coating layer to an electron beam to form micropatterns; etching the quartz substrate by using the resist coating layer, in which the micropatterns are formed, as a mask; and removing the resist coating layer to obtain a master in which micropatterns are formed.

主权项

1. An apparatus comprising:
a light-transmitting substrate; a silicon oxide or silicon nitride layer comprising patterns, formed on the substrate; and a conductive layer implanted in the silicon oxide or silicon nitride layer.