发明名称 ORGANIC LIGHT EMITTING DISPLAY MANUFACTURING DEVICE AND METHOD USING THEREOF
摘要 <p>In a process of forming an encapsulation layer to encapsulate a light-emitting layer of an organic light-emitting display device, provided is a manufacturing device of an organic light-emitting display device, which prevents inorganic materials from depositing the back surface of substrates and an encapsulation property from decreasing, and a manufacturing method using the same. More specifically, the manufacturing device of the organic light-emitting display device in the present invention comprises at least one support device with a plate in which the substrate is seated; and a processing device which sprays reaction gas to the upper part of the substrate in one side of the support device and inhales the reaction gas flowing through the upper of the plate in the other side of the support device.</p>
申请公布号 KR20140147653(A) 申请公布日期 2014.12.30
申请号 KR20130148702 申请日期 2013.12.02
申请人 LG DISPLAY CO., LTD. 发明人 CHOI, HYUN MIN;YOO, CHOONG KEUN;YOON, JONG GEUN;BAIK, SEUNG MIN
分类号 H01L51/56 主分类号 H01L51/56
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