| 发明名称 | MEMS element | ||
| 摘要 | According to one embodiment, a MEMS element comprises a first electrode that is fixed on a substrate and has plate shape, a second electrode that is disposed above the first electrode while facing the first electrode, the second electrode being movable in a vertical direction and having plate shape, and a first film that includes a first cavity in which the second electrode is accommodated on the substrate. The second electrode is connected to an anchor portion connected to the substrate via a spring portion. An upper surface of the second electrode is connected to the first film. | ||
| 申请公布号 | US8921958(B2) | 申请公布日期 | 2014.12.30 |
| 申请号 | US201213603967 | 申请日期 | 2012.09.05 |
| 申请人 | Kabushiki Kaisha Toshiba | 发明人 | Ikehashi Tamio |
| 分类号 | B81B3/00;G01L9/00 | 主分类号 | B81B3/00 |
| 代理机构 | Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P. | 代理人 | Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P. |
| 主权项 | 1. A MEMS element comprising: a first electrode that is fixed on a substrate and has a plate shape; a second electrode that is disposed above the first electrode while facing the first electrode, the second electrode being movable in a vertical direction and having a plate shape; and a first film that covers a first cavity in which the second electrode is accommodated on the substrate, wherein the second electrode is connected to an anchor portion connected to the substrate via a spring portion,a part of an upper surface of the second electrode is connected to the first film,an empty space exists between the upper surface of the second electrode and the first film, andthe first film has a spring constant enabling the first film to move vertically with respect to the first electrode. | ||
| 地址 | Tokyo JP | ||