发明名称 |
Electronic device having electrodes bonded with each other |
摘要 |
According to this disclosure, a method of manufacturing an electronic device is provided, which includes exposing a top surface of a first electrode of a first electronic component to organic acid, irradiating the top surface of the first electrode exposed to the organic acid with ultraviolet light, and bonding the first electrode and a second electrode of a second electronic component by heating and pressing the first electrode and the second electrode each other. |
申请公布号 |
US8922027(B2) |
申请公布日期 |
2014.12.30 |
申请号 |
US201213671970 |
申请日期 |
2012.11.08 |
申请人 |
Fujitsu Limited |
发明人 |
Sakai Taiji;Imaizumi Nobuhiro |
分类号 |
H01L23/48;H01L23/52;H01L29/40;H01L23/12;H01L23/00;H01L23/488;G21K5/02;H01L21/67;H01L21/762 |
主分类号 |
H01L23/48 |
代理机构 |
Kratz, Quintos & Hanson, LLP |
代理人 |
Kratz, Quintos & Hanson, LLP |
主权项 |
1. An electronic device, comprising:
a first electronic component including a first electrode consisting of copper; and a second electronic component including a second electrode bonded to the first electrode, the second electrode consisting of copper, wherein a crystal layer consisting of copper is formed between the first electrode and the second electrodes, crystal grains of the crystal layer have an average diameter smaller than average diameters of crystal grains of the first electrode and the second electrode, and in any one of interfaces, the interfaces being the one between the first electrode and the a plurality of interfaces, crystal layer and the one between the second electrode and the crystal layer, orientations of the copper crystalline grains are discontinuous. |
地址 |
Kawasaki-shi, Kanagawa JP |