| 摘要 |
<p>A shape measurement apparatus includes: a measuring unit, a shape calculating unit, a measurement target arrangement unit, a transport unit, and a coupling-separation unit. The measuring unit generates variable wavelength light and receives light through a first optical path and light through a second optical path. The shape calculating unit calculates the shape of a measurement target based on the change in interference resulted from the wavelength change in the light through the first and second optical paths received by the measuring unit. The measurement target is arranged in the measurement target arrangement unit. The transport unit transports at least one of the measuring unit and the measurement target arrangement unit. The coupling-separation unit integrally couples the measuring unit with the measurement target arrangement unit before the measurement of the measurement target, and separates the measuring unit from the measurement target arrangement unit before the relative transport of the measurement target. According to the present invention, vibration, disturbance, or the like during the course of the transport or measurement, if any, has a limited effect on the measurement.</p> |
