发明名称 TEST CIRCUIT OF SEMICONDUCTOR DEVICE AND TEST METHOD OF SEMICONDUCTOR DEVICE
摘要 <p>The present invention relates to a test circuit of a semiconductor device and a method thereof. According to the embodiment of the present invention, provided is the semiconductor device which includes a first die and a second die which are connected through a through silicon via (TSV) and a test circuit part which measures the resistance of the TSV by controlling an amount of currents flowing in the TSV. Thereby, the present invention accurately measures the resistance of the TSV.</p>
申请公布号 KR20140146822(A) 申请公布日期 2014.12.29
申请号 KR20130069603 申请日期 2013.06.18
申请人 SK HYNIX INC. 发明人 LEE, DONG UK
分类号 H01L21/66;H01L21/768 主分类号 H01L21/66
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