METHOD FOR HYBRIDISATION OF READING LSI CHIPS AND PHOTOSENSITIVE ELEMENT ARRAY OF PHOTODETECTOR DEVICES

摘要

FIELD: physics.SUBSTANCE: method for hybridisation of reading LSI chips and a photosensitive element array of photodetector devices includes pressing in indium microcontacts located on chips to be interfaced. The microcontacts are in the form of stretched rectangles with side dimensions smaller than the gaps between the microcontacts, both on the vertical and the horizontal. The microcontacts on the LSI chips and the photosensitive element array are located at an angle to each other.EFFECT: high reliability of interfacing reading LSI chips and a photosensitive element array while preventing shorting of adjacent microcontacts.5 dwg