TRANSFER SUBSTRATE OF JOULE-HEATING EVAPORATING APPARATUS
摘要
<p>A joule-heating evaporating apparatus according to the present invention includes a compensation pattern which is formed on a current path to compensate the deviation of the length of the current path between heating electrodes and first and second voltage applying regions. The compensation pattern makes the joule-heating evaporating apparatus form a film with a uniform thickness by making a current with the same amplitude flow in each heating electrode.</p>
