| 摘要 |
<p>The present invention relates to an in-line test handler capable of sensing the generation of a failure of devices automatically which perform a loading process, a test process, and an unloading process. The in-line test handler according to the present invention comprises; a first chamber unit wherein a test process for a semiconductor device is executed; a second chamber unit which is separately installed from the first chamber unit to be faced to a different direction of the first chamber unit and executes the test process for the semiconductor device; a sorting unit which is connected with the first and second chamber units by in-line and stores a semiconductor device to be tested in a test tray and separates the tested semiconductor device from the test tray; and a control server which monitors the state of the sorting unit, the first chamber unit, and the second chamber unit and determines the generation of a failure of the sorting unit, the first chamber unit, and the second chamber unit and produces an alarm signal when a failure breaks down and provides the alarm signal to a wireless device of an operator. According to the present invention, the control server automatically senses the generation of a failure of each device by monitoring the state of the device which performs the loading process, the unloading process, and the test process in real time. Therefore, the prevention of a working time loss can be maximized by handling the failure immediately.</p> |
